Semiconductor Equipment and Materials International (SEMI) at SEMI The F21-1102 standard divides AMC into 4 categories, as shown in the following table:
Classification | English name | Description |
MA | Molecular Acids | Chemically corrosive gas phase substances that can accept electrons (acceptors) |
MB | Molecular Bases | Chemically corrosive gas phase substances that can donate electrons (donors) |
MC | Molecular Condensables | Gas phase substances that can condense on clean surfaces under normal temperature and pressure |
MD | Molecular Dopants | Gas phase substances that can change the conductivity of semiconductor materials |
